As an excellent measuring electronic device, ZYGO ZMI-4004 belongs to the highly innovative ZMI™ series of ZYGO Corporation. It firmly occupies a key position in many industries with strict requirements for precision, such as semiconductor manufacturing, precision machinery processing, and scientific research.

ZYGO Corporation, as a leader in the field of precision optical measurement, has meticulously created this high-performance product, ZMI-4004, relying on its profound technical heritage and persistent innovative spirit. This product can be called the core soul of the displacement measurement interferometer system. It is mainly responsible for processing and in-depth analysis of signals from ZYGO interferometers, thereby achieving amazing nanoscale high-precision displacement measurement, fully demonstrating ZYGO Corporation's unremitting pursuit and persistent adherence to high precision and reliability.

II. Technical Parameters

Displacement measurement resolution: ZMI-4004 has an amazing sub-nanometer resolution, which can accurately detect displacement changes as small as 0.15 nanometers. Such ultra-high resolution enables it to Acute ly capture extremely subtle displacement differences, perfectly meeting the extreme demand for high-precision measurement in cutting-edge fields such as nanotechnology and semiconductor manufacturing. It should be noted that in these fields, even an extremely small displacement deviation may, like the "butterfly effect", have a subversive and significant impact on product quality and performance.

Number of measurement axes: This device supports up to four measurement axes and can connect four interferometers at the same time to realize multi-dimensional displacement measurement. In complex measurement scenarios, this multi-axis measurement capability has obvious advantages, which can comprehensively and accurately obtain the displacement information of objects in different directions. With this, researchers and engineers can gain an in-depth insight into the movement state and change trend of the measured object, providing rich and comprehensive data support for research and production.

Interface type: It adopts the advanced VME64x interface, which is widely used in high-performance data acquisition and control systems. Through the VME64x interface, ZMI-4004 can interact and communicate with other devices at an extremely fast speed and high stability, effectively ensuring the efficiency and reliability of data transmission. At the same time, it also thoughtfully supports RS232 or RS485 interfaces. This design greatly facilitates the connection with some traditional devices or devices with relatively low requirements for communication rate, significantly enhancing the compatibility and applicability of the device, enabling it to easily integrate into various types of measurement systems.

Data transmission rate: It has a data transmission rate of up to 10MHz, which can transmit a large amount of measurement data quickly and stably. This feature plays a crucial role in application scenarios that require real-time processing and analysis of large amounts of data, ensuring that measurement data can be obtained and processed in a timely and accurate manner, providing a strong guarantee for efficient decision-making.

Optical connection mode: It adopts ST optical fiber connection, which has excellent optical signal transmission performance, can effectively reduce signal loss, ensure high-quality transmission of measurement signals, and thus improve the accuracy and stability of measurement. At the same time, combined with HSSDC electrical connection, the electrical performance of the device is further optimized to ensure that the device can run stably in complex working environments.

Environmental parameters: In terms of operating temperature, it can usually adapt to the temperature range of 10 degrees Celsius to 35 degrees Celsius. Within this temperature range, the device can maintain stable performance and will not be significantly affected by temperature fluctuations. The working humidity range is generally 20% - 80%, with a certain moisture-proof ability, which can work normally in common humidity environments, and will not cause a decline in electrical performance or measurement accuracy due to moisture problems.

III. Functional Features

High-precision measurement function: The core high-precision measurement function is undoubtedly the biggest highlight of ZMI-4004. With the help of advanced signal processing algorithms and precise optical interference principles, it can accurately analyze the signals collected by the interferometer to obtain extremely accurate displacement measurement results. Taking the semiconductor manufacturing process as an example, the displacement control of the wafer in the chip manufacturing equipment is extremely demanding. ZMI-4004 can monitor the displacement changes of the wafer in real-time and accurately, ensuring the accuracy and consistency of the chip manufacturing process, and effectively improving the yield of chips.

Cyclic error compensation function: It uses patented cyclic error compensation technology, which can automatically and seamlessly eliminate the inherent nonlinear errors common in DMI systems. This error compensation function is of great significance for improving the accuracy and repeatability of measurement. Especially in scenarios that require multiple repeated measurements or long-term continuous measurements, it can ensure the consistency and reliability of each measurement result, avoid measurement deviations caused by system errors, and provide solid and reliable data support for scientific research experiments and industrial production.

Advantages of modular design: It adopts the modular design concept and has excellent scalability. It can work together with other ZMI™ series boards to easily expand to up to 64 measurement axes. This modular design provides users with great flexibility. Whether building a simple small-scale measurement system or a complex large-scale industrial automation measurement network, users can construct the most suitable measurement solution according to actual needs by reasonably adding or combining modules, effectively reducing the system construction cost and the difficulty of later upgrade and maintenance.

Software support function: It is equipped with special data acquisition, analysis, and visualization software. The software has a user-friendly interface and is easy to learn, so even users without professional programming background can master it quickly. Through this software, users can conveniently set measurement parameters, start measurement tasks, and view the change curves and charts of measurement data in real-time. At the same time, the software also has powerful data analysis functions, which can perform statistical analysis and filtering processing on measurement data, helping users deeply explore the information behind the data and providing a strong basis for decision-making.

IV. Application Fields

Semiconductor manufacturing field: ZMI-4004 plays a pivotal role in the entire process of semiconductor manufacturing. In the lithography process, it is necessary to control the displacement of the lithography machine's workbench with high precision. ZMI-4004 can monitor the tiny displacement of the workbench in real-time to ensure the accurate positioning of the lithography pattern, thereby greatly improving the manufacturing precision and performance of the chip. In the chip packaging process, the alignment accuracy between the chip and the substrate is extremely high. ZMI-4004 can be used to measure and adjust the position of the chip to ensure the accuracy and reliability of the packaging and effectively reduce the rejection rate. In addition, in the research and development and maintenance of semiconductor equipment, it is also necessary to rely on the high-precision measurement function of ZMI-4004 to perform performance testing and fault diagnosis on key components of the equipment to ensure the normal operation of the equipment.

Precision machinery processing field: In precision machinery processing, as the requirements for processing precision are increasingly high, the importance of ZMI-4004 is becoming more and more prominent. It can be used to monitor and control the motion accuracy of machine tools. By measuring the relative displacement between the tool and the workpiece in real-time, it can timely adjust the motion parameters of the machine tool to ensure the dimensional accuracy and surface quality of the processed parts. For example, in the processing of components in the aerospace field, many key parts require processing precision to reach the micron or even nanometer level. ZMI-4004 can provide reliable measurement guarantee for these high-precision processing tasks, ensuring that the processed parts meet strict quality standards.

Scientific research field: In nanotechnology research, scientists need to accurately measure and analyze the growth process, structural changes, and mechanical properties of nanomaterials. The sub-nanometer resolution and multi-axis measurement function of ZMI-4004 make it a powerful assistant in nanotechnology research, which can help researchers deeply understand the characteristics and behaviors of nanomaterials and promote the vigorous development of nanotechnology. In the field of optical research, the requirements for measuring the surface morphology and optical properties of optical components are extremely high. As a high-precision measuring device, ZMI-4004 can be used to measure parameters such as surface roughness and surface shape error of optical lenses, mirrors, and other components, providing important data support for the design and optimization of optical systems. In biomedical research, some high-precision experimental equipment, such as atomic force microscopes, also need to rely on the high-precision displacement measurement function of ZMI-4004 to realize the accurate operation and observation of biological samples.

Optical manufacturing field: In the manufacturing process of optical components such as optical lenses, prisms, and mirrors, ZMI-4004 is used to strictly detect the surface quality of optical components. By measuring parameters such as morphology, roughness, and curvature of the optical component surface, it can judge whether it meets the design requirements, timely find and correct defects in the manufacturing process, and improve the yield of optical components. In the assembly process of optical systems, ZMI-4004 can be used to accurately adjust the position and angle of optical components to ensure the optical axis consistency and imaging quality of the optical system, providing a solid guarantee for the production of high-quality optical instruments such as telescopes, microscopes, and projectors.