Description
Zygo 8010-0105-02 ZMI-501
I. Product Overview
Zygo 8010-0105-02 ZMI-501, as an important member of Zygo's ZMI™ series, demonstrates excellent performance and value in the field of precision measurement. With years of profound accumulation and continuous innovative exploration in the field of precision optical measurement, Zygo has successfully created this high-performance measuring device. It occupies an irreplaceable key position in many industries with nearly harsh requirements for precision, such as semiconductor manufacturing, precision machinery processing, and scientific research.
ZMI-501 is mainly responsible for accurately processing and in-depth analysis of optical signals from Zygo interferometers, thereby achieving high-precision displacement measurement, and is the core hub of the entire displacement measurement interferometer system. Through advanced technical means, it can convert complex signals collected by interferometers into accurate displacement data, perfectly interpreting Zygo's ultimate pursuit of measurement accuracy and equipment reliability.
II. Technical Parameters
(1) Displacement Measurement Resolution
ZMI-501 has an impressive sub-nanometer resolution, capable of accurately detecting displacement changes as small as 0.1nm. Such ultra-high resolution enables it to Acute ly capture extremely subtle displacement differences. In cutting-edge fields such as nanotechnology and semiconductor manufacturing, even extremely small displacement deviations may have a subversive impact on product quality and performance. For example, in the chip manufacturing process, the spacing between circuits on the chip has reached the nanoscale, and any slight displacement error may lead to short circuits or open circuits in the circuits, thereby rendering the chip useless. The ultra-high resolution of ZMI-501 can effectively meet the high-precision measurement requirements in these key links, ensuring that the produced chips meet strict quality standards.
(2) Number of Measurement Axes
The device supports up to two measurement axes and can connect two interferometers simultaneously to achieve displacement measurement in two-dimensional space. In some complex measurement scenarios, the movement of objects is often not in a single dimension, so multi-axis measurement capability is particularly important. For example, in precision machinery processing, machine tool cutters may displace in both X and Y directions during processing. The dual-axis measurement function of ZMI-501 can comprehensively and accurately obtain displacement information of the cutter in these two directions, providing comprehensive data support for engineers to adjust machine tool parameters, thereby ensuring the dimensional accuracy and surface quality of the processed parts.
(3) Interface Types
- VME64x Interface: It adopts the advanced VME64x interface, which is widely used in high-performance data acquisition and control systems. Through the VME64x interface, ZMI-501 can interact and communicate with other devices at an extremely fast speed, effectively ensuring the efficiency of data transmission. For example, in semiconductor manufacturing equipment, a large amount of measurement data needs to be quickly transmitted to the control system for real-time analysis and processing. The VME64x interface can ensure stable and efficient data transmission between ZMI-501 and other devices, meeting the strict requirements for real-time performance in the production process.
- RS232 or RS485 Interface: At the same time, it also supports RS232 or RS485 interfaces, facilitating connection with some traditional devices or devices with relatively low communication rate requirements. In some industrial automation production lines, there may be some old equipment that only has RS232 or RS485 interfaces. This design of ZMI-501 greatly enhances the compatibility and applicability of the device, enabling it to easily integrate into various types of measurement systems, whether it is a modern high-speed production line or a mixed production line containing some traditional equipment, and can exert its measurement advantages.
(4) Data Transmission Rate
ZMI-501 has a data transmission rate of up to 10MHz, capable of transmitting a large amount of measurement data quickly and stably. This feature plays a crucial role in application scenarios that require real-time processing and analysis of large amounts of data. For example, in some experiments in the scientific research field, it is necessary to monitor and analyze displacement changes in real-time during the experiment, and a large amount of data needs to be transmitted to the computer for processing in a timely manner. The high-speed data transmission capability of ZMI-501 ensures that measurement data can be obtained and processed in a timely and accurate manner, providing a strong guarantee for researchers to make decisions quickly, which helps improve the efficiency and accuracy of scientific research experiments.
(5) Optical Connection Method
- ST Optical Fiber Connection: It adopts ST optical fiber connection, which has excellent optical signal transmission performance, can effectively reduce signal loss, and ensure high-quality transmission of measurement signals. In the process of long-distance data transmission, signal loss is a key issue, and ST optical fiber connection can minimize signal loss, thereby improving the accuracy and stability of measurement. For example, in the production lines of some large factories, there may be a certain distance between the measuring equipment and the control center. ST optical fiber connection can ensure the integrity of the measurement signal during transmission, making the signal received by the control center accurate and reliable, and thus realizing precise control of the production process.
- HSSDC Electrical Connection: Combined with HSSDC electrical connection, the electrical performance of the device is further optimized to ensure stable operation of the device in complex working environments. In industrial production environments, there are often various complex factors such as electromagnetic interference. HSSDC electrical connection can enhance the anti-interference ability of the device, ensuring that the device can still work stably in such harsh environments, providing a solid guarantee for the accuracy of measurement data.
(6) Environmental Parameters
- Operating Temperature: In terms of operating temperature, it can usually adapt to the temperature range of 10 degrees Celsius to 35 degrees Celsius. Within this temperature range, the device can maintain stable performance and will not be significantly affected by temperature fluctuations. Whether in the cold winter workshops in the north or the hot summer factory environments in the south, as long as the temperature is within this range, ZMI-501 can work normally, providing stable measurement support for the production and scientific research work of enterprises.
- Operating Humidity: The operating humidity range is generally 20% - 80%, with a certain moisture-proof capability, and can work normally in common humidity environments without causing a decline in electrical performance or measurement accuracy due to moisture problems. In factories in some coastal areas, the air humidity is relatively high. The moisture-proof design of ZMI-501 enables it to operate stably in such environments, ensuring the reliability of measurement data and avoiding unnecessary troubles caused by humidity problems to production and scientific research.
III. Functional Features
(1) High-Precision Measurement Function
The high-precision measurement function is the core highlight of ZMI-501. With the help of advanced signal processing algorithms and precise optical interference principles, it can accurately parse the signals collected by the interferometer, thereby obtaining extremely accurate displacement measurement results. Taking the semiconductor manufacturing process as an example, the displacement control of wafers in chip manufacturing equipment is extremely demanding. In the lithography process, the workbench of the lithography machine needs to move extremely accurately to ensure the precise positioning of the lithography pattern. ZMI-501 can monitor the displacement changes of the wafer in real-time and accurately, ensuring the accuracy and consistency of the chip manufacturing process, and effectively improving the yield of chips. If the displacement of the wafer deviates during the lithography process, the lithographed circuit pattern will be inaccurate, leading to reduced chip performance or even scrapping. The high-precision measurement function of ZMI-501 can timely detect and correct these displacement deviations, providing reliable guarantee for chip manufacturing.
(2) Cyclic Error Compensation Function
It uses patented cyclic error compensation technology, which can automatically and seamlessly eliminate the inherent nonlinear errors common in DMI systems. In the actual measurement process, due to the influence of various factors, the measurement system often has some inherent errors, which will affect the accuracy and repeatability of the measurement results. The cyclic error compensation function of ZMI-501 can automatically compensate for these errors, especially in scenarios that require multiple repeated measurements or long-term continuous measurements, which can ensure the consistency and reliability of each measurement result. For example, in scientific research experiments, it is necessary to perform multiple displacement measurements on a sample to obtain accurate experimental data. If the measurement system has inherent errors, the results of multiple measurements may have large deviations, affecting the accuracy of the experimental conclusions. The cyclic error compensation function of ZMI-501 can effectively avoid this situation, providing solid and reliable data support for scientific research experiments.
(3) Advantages of Modular Design
It adopts a modular design concept. Although ZMI-501 itself is an independent dual-axis measurement device, it can work in collaboration with other ZMI™ series boards and has certain expandability. This modular design provides users with great flexibility. Users can construct the most suitable measurement solution by reasonably adding or combining modules according to actual needs. For example, in some scenarios where the production scale is gradually expanding or scientific research projects are continuously deepening, the demand for the number of measurement axes may increase. Users can add corresponding ZMI series boards on the basis of the existing ZMI-501 to easily expand the number of measurement axes, effectively reducing the system construction cost and the difficulty of later upgrade and maintenance. At the same time, the modular design also makes it more convenient to repair and replace parts. When a module fails, only the corresponding module needs to be replaced, without the need for large-scale maintenance of the entire device.
(4) Software Support Function
It is equipped with special data acquisition, analysis, and visualization software. The software has a user-friendly interface and is easy to use, so even users without professional programming background can quickly master it. Through this software, users can conveniently set measurement parameters, start measurement tasks, and view real-time change curves and charts of measurement data. For example, in the process of precision machinery processing, operators can set parameters such as measurement accuracy and measurement time interval through the software, and then start the measurement task. During the measurement process, the software will display the displacement change curve between the cutter and the workpiece in real-time, allowing operators to intuitively understand the displacement situation during processing. At the same time, the software also has powerful data analysis functions, which can perform statistical analysis and filtering processing on measurement data, helping users deeply 挖掘 the information behind the data and providing a strong basis for decision-making. For example, after conducting statistical analysis on a large amount of measurement data, users can find potential problems in the processing process, such as large displacement deviations in a certain period of time, thereby adjusting the processing process in a timely manner and improving product quality.
IV. Application Fields
(1) Semiconductor Manufacturing Field
ZMI-501 plays a pivotal role in the entire process of semiconductor manufacturing.
- Lithography Process: In the lithography process, high-precision control of the displacement of the lithography machine's workbench is required. ZMI-501 can monitor the tiny displacement of the workbench in real-time to ensure the precise positioning of the lithography pattern. With the continuous progress of chip manufacturing technology, the requirements for lithography accuracy are getting higher and higher, and the circuit lines on the chip are getting thinner and thinner, which requires the workbench of the lithography machine to achieve nanoscale displacement accuracy. The high-precision measurement function of ZMI-501 can meet this demand. It can feedback the displacement information of the workbench in real-time, and the control system adjusts the workbench accurately according to this information, thereby greatly improving the manufacturing accuracy and performance of the chip. If the lithography pattern is not positioned accurately, the circuits on the chip will have problems such as short circuits or open circuits, causing the chip to fail to work normally.
- Chip Packaging Process: In the chip packaging process, the alignment accuracy between the chip and the substrate is extremely high. ZMI-501 can be used to measure and adjust the position of the chip to ensure the accuracy and reliability of the packaging, and effectively reduce the scrap rate. Chip packaging is the process of connecting the chip to the substrate and protecting it. The alignment accuracy between the chip and the substrate directly affects the electrical performance and reliability of the chip. ZMI-501 can accurately measure the relative displacement between the chip and the substrate. Operators can fine-tune the position of the chip according to the measurement results to ensure accurate connection between the chip and the substrate, thereby improving the quality of packaging, reducing the scrap rate, and reducing production costs.
- Semiconductor Equipment R&D and Maintenance: In the R&D and maintenance of semiconductor equipment, it is also necessary to rely on the high-precision measurement function of ZMI-501 to perform performance testing and fault diagnosis on key components of the equipment to ensure the normal operation of the equipment. For example, when developing a new type of lithography machine, it is necessary to test and optimize the displacement accuracy of various moving parts of the lithography machine. ZMI-501 can provide accurate measurement data to help researchers understand the performance status of the equipment, find potential problems and make improvements. During equipment maintenance, if the equipment fails, maintenance personnel can use ZMI-501 to measure key components, determine the cause of the failure, and repair it quickly to ensure the continuity of production.
(2) Precision Machinery Processing Field
In precision machinery processing, as the requirements for processing accuracy are increasing, the importance of ZMI-501 is becoming more and more prominent. It can be used to monitor and control the motion accuracy of machine tools. By measuring the relative displacement between the cutter and the workpiece in real-time, it can adjust the motion parameters of the machine tool in a timely manner to ensure the dimensional accuracy and surface quality of the processed parts. For example, in the processing of components in the aerospace field, many key parts require processing accuracy to reach the micron or even nanometer level, such as the processing of engine blades. ZMI-501 can monitor the displacement changes of the cutter in real-time during processing. When it is found that the displacement deviation exceeds the allowable range, it will send a signal to the machine tool control system in a timely manner. The control system adjusts the motion parameters of the machine tool according to the signal, such as the feed speed and cutting depth of the cutter, thereby ensuring that the processed parts meet strict quality standards. If the motion accuracy of the machine tool is not well controlled, the processed engine blades may have problems such as dimensional deviation and surface roughness not meeting the requirements, affecting the performance and reliability of the engine.
