Description
1. Overview
AMAT 0100-71267 is an original precision DC power supply module developed by Applied Materials for semiconductor wafer processing equipment. It is widely compatible with AMAT etching, PVD, CVD and ion implantation systems, providing stable and low-noise power supply for internal control boards, sensors, solenoid valves and precision detection circuits. As a core electrical component, it ensures consistent process performance, stable cavity status and high wafer yield in precision semiconductor manufacturing.
Featuring high precision voltage regulation, ultra-low ripple noise and strong load adaptability, the module effectively eliminates process drift and equipment alarms caused by grid fluctuation and load sudden changes. With standardized original design, it supports direct replacement of aging and faulty power units, serving as a standard spare part for daily maintenance and equipment renovation of in-service AMAT semiconductor equipment.
2. Technical Features
2.1 High-Precision Voltage Stabilization & Ultra-Low Ripple
Adopting semiconductor-grade dedicated voltage stabilization circuit, the module provides fast dynamic response and precise output compensation. Ultra-low ripple and noise avoid interference with weak signal sampling and high-frequency process loops, fully meeting strict power purity requirements of precision wafer processes.
2.2 Full-Function Multi-Level Electrical Protection
Built-in comprehensive protection mechanisms including overvoltage, undervoltage, overcurrent, short circuit and overheating protection. The module locks output quickly under abnormal electrical conditions to prevent damage to rear-end boards, sensors and process modules, minimizing equipment electrical failure risks.
2.3 Wide Load Adaptability & High Stability
Stable operation under light load, rated load and intermittent heavy load conditions without voltage drop or parameter drift. It adapts to dynamic load changes during process start-stop and cavity switching, maintaining consistent performance during long-term 24/7 continuous operation.
2.4 Industrial EMC Anti-Interference Performance
Compliant with strict EMC standards, it resists complex electromagnetic interference from RF modules, frequency converters and high-power equipment in semiconductor workshops. It maintains stable output under static interference, surge impact and harmonic disturbance.
2.5 Plug-and-Play Standardized Replacement
Fully standardized in electrical parameters, installation size and interface definition consistent with original AMAT equipment. Faulty modules can be directly replaced without wiring modification or parameter debugging, greatly reducing equipment downtime.
2.6 Compact Reinforced Structure
Compact modular design fits dense cabinet layout of semiconductor equipment. Dust-proof, moisture-proof and vibration-resistant structure adapts to cleanroom environment and long-term continuous industrial operation with low failure rate and long service life.
3. Detailed Specifications
3.1 Basic Hardware Parameters
- Part Number: 0100-71267
- Manufacturer: Applied Materials (AMAT, USA)
- Product Type: Semiconductor Equipment Dedicated DC Power Supply Module
- Applicable Equipment: AMAT Etching, PVD, CVD and Ion Implantation Systems
- Core Function: Power supply for internal control circuits, sensors and actuators
- Mounting Mode: Cabinet fixed screw mounting / embedded slot mounting
- Structural Feature: Compact industrial reinforced cleanroom-grade design
3.2 Electrical Performance Parameters
- Input Voltage: Industrial standard AC/DC adaptive input (original equipment specification)
- Output Voltage: High-precision stabilized DC output for control loops
- Output Accuracy: Ultra-low voltage deviation under full load
- Ripple Noise: Ultra-low ripple, compliant with semiconductor precision circuit standards
- Rated Power: Matches full-load power consumption of internal control modules
- Dynamic Response: Fast transient load response without voltage oscillation
3.3 Protection Functions
- Input Protection: Overvoltage, undervoltage, reverse polarity and surge protection
- Output Protection: Overcurrent current limiting, short-circuit self-locking, overvoltage clamping
- Thermal Protection: Overheat shutdown and automatic temperature recovery
- Fault Feature: Self-locking fault protection, recoverable after power-off reset
3.4 Environmental Parameters
- Operating Temperature: 0℃ ~ +70℃
- Storage Temperature: -20℃ ~ +80℃
- Operating Humidity: 10%～90%RH (Non-condensing, dust-free, non-corrosive)
- Environmental Resistance: Anti-EMI, anti-static, high-temperature resistant
- Applicable Environment: Semiconductor cleanroom and precision equipment cabinet
4. Operating Principle
After power-on, the AMAT 0100-71267 module performs rectification, filtering, stabilization and noise reduction on input power to convert fluctuating industrial power into high-purity, stable DC power for internal precision control modules, sensors and actuator loops.
The module collects real-time output voltage, current and temperature data, and dynamically corrects output status through closed-loop regulation algorithm to offset interference from grid fluctuation, load change and temperature drift. Once faults such as short circuit, overload and overheating are detected, the protection logic cuts off output immediately to avoid secondary equipment damage.
It provides a stable power foundation for semiconductor precision processes, ensuring accurate signal sampling, consistent logic control and stable process timing, effectively preventing process deviation, equipment alarm and cavity abnormal status to support high-yield continuous production.
5. Application Scenarios
1. Special power supply for internal control system of AMAT etching, PVD, CVD and ion implantation semiconductor equipment.
2. Precision power supply for vacuum, temperature and displacement sensor detection loops to ensure sampling accuracy.
3. Direct replacement spare part for aging, abnormal or faulty power modules of in-service semiconductor equipment.
4. Electrical system upgrading and hardware renovation for legacy AMAT wafer processing equipment.
